JPH0641163Y2 - 表面検査装置 - Google Patents
表面検査装置Info
- Publication number
- JPH0641163Y2 JPH0641163Y2 JP7678689U JP7678689U JPH0641163Y2 JP H0641163 Y2 JPH0641163 Y2 JP H0641163Y2 JP 7678689 U JP7678689 U JP 7678689U JP 7678689 U JP7678689 U JP 7678689U JP H0641163 Y2 JPH0641163 Y2 JP H0641163Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- emitting diode
- light emitting
- outer ring
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007689 inspection Methods 0.000 title claims description 29
- 230000003287 optical effect Effects 0.000 claims description 3
- 210000000078 claw Anatomy 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000003028 elevating effect Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 4
- 230000005856 abnormality Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7678689U JPH0641163Y2 (ja) | 1989-06-29 | 1989-06-29 | 表面検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7678689U JPH0641163Y2 (ja) | 1989-06-29 | 1989-06-29 | 表面検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0316051U JPH0316051U (en]) | 1991-02-18 |
| JPH0641163Y2 true JPH0641163Y2 (ja) | 1994-10-26 |
Family
ID=31618568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7678689U Expired - Fee Related JPH0641163Y2 (ja) | 1989-06-29 | 1989-06-29 | 表面検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0641163Y2 (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3914500B2 (ja) * | 2003-02-12 | 2007-05-16 | 株式会社日立製作所 | 欠陥検査装置 |
| JP5724132B2 (ja) * | 2010-09-07 | 2015-05-27 | キリンテクノシステム株式会社 | 表面検査装置 |
| JP2017096844A (ja) * | 2015-11-26 | 2017-06-01 | 澁谷工業株式会社 | 物品検査装置 |
-
1989
- 1989-06-29 JP JP7678689U patent/JPH0641163Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0316051U (en]) | 1991-02-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |